| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a highly accurately processed article by achieving the equalization of pressure distribution acting on a workpiece from a processing tool by a simple configuration without requiring the setting of complicated processing conditions and control. Ž<P>SOLUTION: A workpiece holding device 1 supports a U-shaped upper arm 12 through an upper arm support 13a and an upper arm support 13b at both ends of a U-shaped swing arm 11 horizontally held at a stay 6 through a swing arm support 14 and disposes a workpiece axis support 4 for supporting a lens 3 to be processed at the center of the upper arm 12. An L-shaped magnetic body 20a and an L-shaped magnetic body 20b are arranged at respective connection parts of both ends of the swing arm 11 and both ends of the upper arm 12. Processing pressure acting on an arbitrary tilted direction intersecting an axis Z is controlled between a polishing tool facing the lens 3 to be processed and them. The sum of the processing pressures is equalized in the radial direction of the lens 3 to be processed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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