| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film-forming device which restrains pinholes from being formed due to a foreign substance and forms a defect-free film. Ž<P>SOLUTION: The film-forming device includes; a film-forming part 10 which coats the processing object face Xs of a processing object substrate X with a film-forming material to form a film; and a foreign substance-removing part 20 which is connected to the film-forming part 10 and removes a foreign substance F adhering to the processing object face Xs. The foreign substance-removing part 20 has; a processing chamber 21 in which the processing object substrate X is accommodated; and a jetting nozzle 22 which is provided in the processing chamber 21 and removes the foreign substance F from the processing object face Xs. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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