| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a clean booth capable of providing a space having necessary cleanness at low costs while reducing use materials and simplifying its maintenance, by blocking off air environment of a device needing a clean area from external contaminated environment in various fields. Ž<P>SOLUTION: Cleaning units (1), (6) reduced in weights by not using diffuser panels such as punch boards, and having a cylindrical filer capable of distributing the cleaning airflow to the entire circumferential direction, are disposed on leg poles (3) and the like of a booth structural material, thus usage of members can be reduced, and energy for processing an antistatic vinyl sheet (4) and the like for blocking out the external contaminated environment, can be minimized. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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