发明名称 PLASMA COATING SYSTEM AND METHOD FOR COATING OR TREATING THE SURFACE OF A SUBSTRATE
摘要 The invention relates to a plasma coating system for coating or treating the surface of a substrate (3), comprising a working chamber (2) that can be evacuated and in which the substrate (3) can be placed, and comprising a plasma burner (4) for producing a plasma beam (5) by heating a process gas. The plasma burner (4) has a nozzle (41) through which the plasma beam (5) can exit the plasma burner (4) and can extend along a longitudinal axis (A) in the working chamber (2), wherein downstream of the nozzle (41) a mechanical delimiting device (12) is provided in the working chamber (2) and extends along the longitudinal axis (A) and protects the plasma beam (5) against a lateral, undesired penetration of particles. The invention further relates to a corresponding method.
申请公布号 CA2750789(A1) 申请公布日期 2010.08.12
申请号 CA20102750789 申请日期 2010.01.15
申请人 SULZER METCO AG 发明人 GINDRAT, MALKO;GUITTIENNE, PHILIPPE;HOLLENSTEIN, CHRISTOPH
分类号 H05H1/34;H01J37/32 主分类号 H05H1/34
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