| 摘要 |
<P>PROBLEM TO BE SOLVED: To effectively remove a foreign matter from a chuck having projections and recesses on the surface. <P>SOLUTION: An suction means 31 is disposed above a chuck 10 having a plurality of projections 11 on the surface; the chuck 10 is moved by an X stage 5 and a Y stage 7 so as to move the foreign matter on the chuck 10 to below the suction means 31; the suction means 31 is moved up or down; and the foreign matter on the chuck 10 is removed by suction by the suction means 31. Otherwise, a sucking means 32 is disposed above the chuck 10; the chuck 10 is moved by the X stage 5 and the Y stage 7 to below the sucking means 32; and the foreign matter on the chuck 10 is removed by sucking by the sucking means 32. As the foreign matter on the chuck 10 is removed by suction or sucking by the suction means 31 or the sucking means 32, the foreign matter on the chuck 10 is effectively removed even when the surface of the chuck 10 has projections and recesses. <P>COPYRIGHT: (C)2010,JPO&INPIT |
