| 摘要 |
PROBLEM TO BE SOLVED: To enhance the efficiency of a conveyance operation of a substrate W by sufficiently restraining the interference of the substrate W and floating units 39 while conveying the substrate W. SOLUTION: The plurality of floating units 39 are arranged for a device frame 3 in a conveyance direction and the respective floating units 39 have a hexagonal planar view, and the floating unit 39 includes two standard ridge edges 39a on a head side and four inclining ridge edges 39b. Nozzles 41 for injecting floating gas are formed along a planar view form on the upper surface of each floating unit 39 and the plurality of floating units 39 are arranged in a staggered array in the conveyance direction. COPYRIGHT: (C)2010,JPO&INPIT
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