| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating applicator which suppresses a solidification of a chemical solution at the end of a nozzle tip, suppresses occurrences of coating defects, and can reduce the exchange frequency of the nozzle tip, and a waiting method of a nozzle. SOLUTION: The coating applicator has a nozzle 5 supplying the chemical solution to be coated on a substrate, and a nozzle waiting part 50 allowing the nozzle 5 to wait in the atmosphere containing vapor of a solvent of the chemical solution. In the coating applicator, an inactive gas is supplied to the atmosphere of the nozzle waiting part 50. COPYRIGHT: (C)2010,JPO&INPIT
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