| 摘要 |
In a logical element (100), supporting portions (105, 106), and a beam (107) supported by them at two ends are formed. The beam (107) has a back side surface spaced apart from the top side surface of a substrate (101), creating a space between the facing surfaces of the beam (107) and substrate (101). An excitation electrode (108) is formed on one supporting portion (105), whereas an oscillation detecting electrode (110) is formed on the other supporting portion (106).
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