发明名称 METHODS OF MANUFACTURING PHASE CHANGE MEMORY DEVICES
摘要 A phase change memory is manufactured by providing a substrate including a layer of phase-change material, forming a damascene pattern on the layer of phase-change material, and forming both a top electrode and a bit line in the damascene pattern.
申请公布号 US2010203672(A1) 申请公布日期 2010.08.12
申请号 US20100702350 申请日期 2010.02.09
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 EUN SUNG-HO;OH JAEHEE
分类号 H01L21/06 主分类号 H01L21/06
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