发明名称 |
SURFACE MEASUREMENT APPARATUS AND SURFACE MEASUREMENT METHOD |
摘要 |
There are provided a surface measurement apparatus and a surface measurement method. A surface measurement apparatus according to an aspect of the invention may include: a stage receiving a target object and causing linear and rotational movements of the target object; a light source irradiating a beam onto the target object and rotating relative to the stage; and a reflected-beam detection unit detecting a beam reflected from the target object. According to an aspect of the invention, a surface measurement apparatus and a surface measurement method can maximize detection performance by detecting foreign bodies present on a surface regardless of optical axes of the beams used for detection.
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申请公布号 |
US2010201974(A1) |
申请公布日期 |
2010.08.12 |
申请号 |
US20090613177 |
申请日期 |
2009.11.05 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
KIM TAK GYUM;KIM BAE KYUN |
分类号 |
G01N21/94 |
主分类号 |
G01N21/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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