发明名称 SURFACE MEASUREMENT APPARATUS AND SURFACE MEASUREMENT METHOD
摘要 There are provided a surface measurement apparatus and a surface measurement method. A surface measurement apparatus according to an aspect of the invention may include: a stage receiving a target object and causing linear and rotational movements of the target object; a light source irradiating a beam onto the target object and rotating relative to the stage; and a reflected-beam detection unit detecting a beam reflected from the target object. According to an aspect of the invention, a surface measurement apparatus and a surface measurement method can maximize detection performance by detecting foreign bodies present on a surface regardless of optical axes of the beams used for detection.
申请公布号 US2010201974(A1) 申请公布日期 2010.08.12
申请号 US20090613177 申请日期 2009.11.05
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM TAK GYUM;KIM BAE KYUN
分类号 G01N21/94 主分类号 G01N21/94
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