| 摘要 |
Disclosed are a high-performance, inexpensive solid state thin film lithium ion secondary battery that is able to be charged and discharged in the atmosphere and can be manufactured at good yield, and a manufacturing method therefor. A solid state thin film lithium ion secondary battery comprises an electrically insulating substrate (10) of an organic resin, an inorganic insulating film that is disposed on the surface of this substrate, a cathode side collector film (30), a cathode active material film (40), a solid state electrolyte film (50), an anode side collector protective film (68), and an anode side collector film (70), which cathode side collector film and/or anode side collector film is/are formed on the surface of the inorganic insulating film. The anode side collector protective film is formed from a conductive oxide including at least one of any oxides of Sn, In, or Zn, maintains a roughly constant total lithium content with charging and discharging, and has a film thickness 2 nm or greater and 22 nm or less. The inorganic insulating film is not less than 5 nm and not more than 500 nm thick and contains at least one of either an oxide or nitride or sulfide containing any of Si, Al, Cr, Zr, Ta, Ti, Mn, Mg, or Zn. |
