CAPACITOR AND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A capacitor and a manufacturing method thereof are provided to prevent the increase of leak current due to the grain growth of a top electrode by forming a capping layer which restrains the grain growth of the upper electrode. CONSTITUTION: A bottom electrode(112) is formed on a substrate(100). A dielectric layer(114) is formed on the surface of the lower electrode by laminating the metal oxide. An upper electrode(116) is formed on the surface of the insulation layer by depositing the material including the metal. A capping layer(118) is formed by depositing the metal oxide to cover the upper side whole of the upper electrode.