| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of heightening the bonding strength of a Si element and a pressing member, and improving the reliability of the bonding of the Si element and the pressing member. SOLUTION: The Si element 130 constituting a glow plug 100 having a tube internal pressure sensor is positioned in a bonded area 130e of a first main surface 130a bonded with the pressing member 125, and forms a bonding auxiliary pattern 139 composed the same material as those of a first bonding area 131y bonded with the pressing member 125 and a pressure-sensitive resistor 131. The Si element also has the bonding auxiliary pattern 139 including a second bonded area 139y which is position in the bonded area 130e, and increases a bonding area of the Si element 130 and the pressing member 125. COPYRIGHT: (C)2010,JPO&INPIT |
