摘要 |
<P>PROBLEM TO BE SOLVED: To prevent contamination due to dust of a material scattered from a target in a chamber and to dispense with frequent cleaning or exchange of an adhesion preventing plate, with respect to a film-deposition device and a method for manufacturing a magnetic recording medium. Ž<P>SOLUTION: The film-deposition device includes a chamber, a main holder holding a first target formed from a first material on a first cathode in the chamber; a sub holder holding a second target formed from a second material, on a second cathode in the chamber; a first DC power source applying a current to the first cathode upon film-deposition to form the first material on the surface of a substrate inside the chamber; and a second DC power source applying a current to the second cathode upon coating treatment to form the second material so as to cover the first material of a part, other than the surface of the substrate in the chamber. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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