发明名称 METHOD OF MANUFACTURING METAL FILTER AND THE METAL FILTER
摘要 <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a metal filter, for accurately forming uniform micropores to monolayer metal foil, and the metal filter. Ž<P>SOLUTION: The method of manufacturing the metal filter includes: an opening forming process of forming a large number of filter openings (opening parts 3a) on a metal film (metal foil 2) to be a filter material; and a plating process of applying metal plating to the metal film on which the large number of filter openings are formed and narrowing the respective filter openings. Thus, the respective filter openings of about 20 μm square is narrowed to 5 μm square to 10 μm square. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010172841(A) 申请公布日期 2010.08.12
申请号 JP20090019294 申请日期 2009.01.30
申请人 SEIKO EPSON CORP 发明人 NANBA TOSHISHIGE
分类号 B01D39/20;A61M1/02;A61M1/22;C23C18/31;C25D7/06 主分类号 B01D39/20
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