| 摘要 |
PROBLEM TO BE SOLVED: To provide a system of which the secondary electrons emitted by FIB irradiation are prevented from turning into noise of an SEM detection signal when observing a process of implementing FIB work in real time by an SEM, in a system including an FIB lens barrel and an SEM lens barrel. SOLUTION: The complex device including the FIB lens barrel and the SEM lens barrel has a slit formed into a shape to be worked at an aperture for the FIB, whereby ion beam work is performed by transferring a pattern to a sample surface instead of running a converged ion beam thereon. COPYRIGHT: (C)2010,JPO&INPIT
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