BONDING METHOD, BONDED BODY, DROPLET EJECTION HEAD, AND DROPLET EJECTION APPARATUS

摘要

A bonding method of manufacturing a bonded body is provided. The bonding method comprises: after providing a first object in which a plasma polymerization film having a surface is formed on a base member, applying an energy to the surface of the plasma polymerization film to activate the surface; after providing a second object having a surface to be bonded to the surface of the plasma polymerization film of the first object and no plasma polymerization film onto the surface of the second object, bonding the surface of the second object and the surface of the activated plasma polymerization film so that the surface of the plasma polymerization film is bonded to the surface of the second object to obtain the bonded body.