METAL OXIDE NANOWIRE SENSOR, MULTIPLE METAL OXIDE NANOWIRE SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A metal oxide nanowire sensor and a method for manufacturing the same are provided to grow a metal oxide nanowire array and to maximize the sensitivity of the nanowire sensor by attaching metal particles to the metal oxide nanowire array. CONSTITUTION: A method for manufacturing a metal oxide nanowire sensor(10) comprises the following steps: forming a trench structure(114) on a substrate; forming a conductive layer(115) on the inner side of the trench structure; forming a catalyst layer on the conductive layer; forming metal oxide nanowire arrays(120A,120B) on the catalyst layer; and attaching metal particles(130) to the metal oxide nanowire array. The trench structure includes silicon.