| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive element which is used as a sensor, even if a piezoelectric/electrostrictive layer cracks. <P>SOLUTION: There is provided a piezoelectric/electrostrictive element 10, including a substrate 11, a lower electrode layer 12 secured onto the substrate 11, and a piezoelectric/electrostrictive layer 13 secured onto the lower electrode layer 12, and the coverage of the lower electrode layer 12 with respect to the substrate 11, is 98% or less. <P>COPYRIGHT: (C)2010,JPO&INPIT |
