| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrical connection device small in difference in distance between an object to be inspected and a needlepoint even when a probe substrate is greatly bent so that its central part may be convex upward. SOLUTION: An electrical connection device 16 includes: a probe substrate 34; and a plurality of contact terminals 36, disposed on a lower surface of the probe substrate, each of which has a needlepoint to be pressed against an electrode of an object to be inspected 12. The closer a contact terminal is located to the center of the probe substrate, the greater is the distance between an imaginary surface parallel to the probe substrate and the needlepoint of that contact terminal. COPYRIGHT: (C)2010,JPO&INPIT
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