发明名称 METHOD OF MANUFACTURING DISPLAY DEVICE AND DISPLAY DEVICE
摘要 A method of manufacturing a display device including the steps of: forming drive elements on a substrate; forming a planarization film in a position corresponding to each of the drive elements; forming a bottom electrode corresponding to each of the plurality of organic light emitting elements; forming a pixel isolation insulating film in a region between the bottom electrodes; forming an organic layer including a light emission layer above the bottom electrode by evaporation using an evaporation mask; and forming a top electrode over the organic layer. In the step of forming the bottom electrode includes the steps of: forming a bottom electrode material film; forming a photoresist film on the bottom electrode material film; exposing the photoresist film using the evaporation mask and developing it; and selectively removing the bottom electrode material film by etching using the photoresist film as a mask.
申请公布号 US2010200869(A1) 申请公布日期 2010.08.12
申请号 US20100698306 申请日期 2010.02.02
申请人 SONY CORPORATION 发明人 SEKIYA MITSUNOBU
分类号 H01L51/52;H01L21/28 主分类号 H01L51/52
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