| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma treatment device capable of preventing a slot plate from wearing out, and preventing a conductive film serving as the slot plate from peeling off from a dielectric plate, even if the slot plate and a dielectric window thermally expand. <P>SOLUTION: A projecting part 22c projecting into the slot 23 of the slot plate 23 is provided in the dielectric plate 22. The surface of the projecting part 22c of the dielectric plate 22 is projected outward from the surface of the dielectric window 12 toward the dielectric window 12. If the slot plate 23 is brought into direct contact with the dielectric window 12, deviation of the amount of elongation is produced due to a difference in the thermal expansion coefficients of the slot plate 23 and the dielectric window 12. If the projecting part 22c of the dielectric plate 22 is brought into contact with the dielectric window 12, and the slot plate 23 is not brought into contact with the dielectric window 12, the slot plate 23 can be prevented from wearing out, and the conductive film serving as the slot plate 23 can be prevented from peeling off from the dielectric plate 22, even if the slot plate 23 and the dielectric window 12 thermally expand. <P>COPYRIGHT: (C)2010,JPO&INPIT |
