| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric resonator in which trimming processing is performed in a short processing time. Ž<P>SOLUTION: The method for manufacturing the piezoelectric resonator 50 includes a step of manufacturing a piezoelectric resonator 10 by forming a first driven electrode 12 on one principal surface of a flat plate type piezoelectric substrate 11 and forming a second excitation electrode 13 having an opposite portion 14 opposed to the first driven electrode 12 with the piezoelectric substrate 11 interposed on the other principal surface; a step of manufacturing a base substrate 1 having connection electrodes 2 and 4 connected to the excitation electrodes 12 and 13 respectively; a step of manufacturing the piezoelectric resonator 50 by mounting the piezoelectric resonator 10 on the base substrate 1 with the first driven electrode 12 opposed to the base substrate 1; and a trimming step of trimming the second excitation electrode 13 of the piezoelectric resonator 10 by irradiating the second excitation electrode 13 with laser light, wherein in the trimming step, a trimming groove 30 for cutting part of the second excitation electrode 13 apart from the opposite portion 14 is formed, for performing trimming. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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