| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface acoustic wave element having superior frequency temperature characteristics equal to or higher than those of an AT cut crystal vibrator. <P>SOLUTION: The surface acoustic wave element 1 has a crystal substrate 2 having a cut angle (0±0.25°, 113 to 135°, ±(40 to 49°)) expressed in terms of Euler angles (ϕ°, θ°, ψ°), an IDT 3 (interdigitated finger electrode) provided on the crystal substrate 2 and having a plurality of electrode fingers 31a and 31b, and an SiO<SB>2</SB>film 6 provided covering the IDT 3 from the opposite side from the crystal substrate 2 and consisting principally of SiO<SB>2</SB>, wherein the SiO<SB>2</SB>film 6 has a standardized film thickness hs/λ of 0.0046 to 0.0233 (where hs is an average thickness [nm] of the SiO<SB>2</SB>film 6 and λ is the wavelength [nm] of a surface acoustic wave). <P>COPYRIGHT: (C)2010,JPO&INPIT |
