| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface acoustic wave element excellent in aging characteristics and reflow characteristics, and to provide a piezoelectric device equipped with the same. SOLUTION: The surface acoustic wave element 2 includes a piezoelectric substrate 21 formed of a piezoelectric material having piezoelectricity, and an IDT 22 which is provided on one surface of the piezoelectric substrate 21 and causes the piezoelectric substrate 21 to excite a surface acoustic wave. The thickness of the piezoelectric substrate 21 is 60 to 200μm. In addition, the piezoelectric substrate 21 is curved so as to be dented toward both sides at which the IDTs 22 are provided by stress that is generated by shrinkage forces of component materials of the IDTs 22. COPYRIGHT: (C)2010,JPO&INPIT |
