| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deposition apparatus capable of highly accurately forming the pixel area of an organic EL display device by suppressing a shadow phenomenon. Ž<P>SOLUTION: The deposition apparatus includes: a deposition source for scattering an organic substance for deposition; a transport means for transporting a substrate to be deposited; and a deposition mask which is disposed so as to cover the substrate to be deposited transported by the transport means and be transported together with the substrate to be deposited, and in which an opening part for deposition is formed, wherein the organic substance from the deposition source is deposited on the substrate to be deposited transported by the transport means via the opening part of the deposition mask. In the deposition mask, an inside inner wall with respect to a deposition source position in the direction vertical to the transport direction by means of the transport means on the opening part is formed on an inclination surface which is inclined in the direction toward the outside from the inside in the mask thickness direction toward the side of the substrate to be deposited from the deposition source side. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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