| 摘要 |
PROBLEM TO BE SOLVED: To rapidly raise the temperature of the whole area in a heat treatment vessel to a uniform value, and to execute a uniform heat treatment to all of a plurality of treatment object substrates housed in the heat treatment vessel in a short time. SOLUTION: In a vertical furnace device 10, inner surfaces 21 of a first heater 2, inner surfaces 13 of a housing part 12, partition walls 14, and outer surfaces 31 of a second heater 3 are formed into square shapes similar to one another in a plan view; and center positions thereof are arranged to be coincident with one another. On a board 4, ten treatment object substrates W are mounted on each of four parts, in the housing part 12, having distances from the first heater 2 and the second heater 3 equal to one another while setting principal surfaces of the treatment object substrates W in parallel to the inner surfaces 13 and the outer surfaces of the partition walls 14. The entire outer surfaces and the entire inner surfaces of the treatment object substrates W are nearly uniformly heated by the heat generated by the first heater 2 and the heat generated by the second heater 3, respectively. COPYRIGHT: (C)2010,JPO&INPIT |
