| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a diaphragm pump for reducing a pressure ripple of a gas being discharged. <P>SOLUTION: The diaphragm pump 1 serving as a pump for transporting a gas by a volumetric change of a pump chamber 12 includes: a discharge valve 30 that allows the gas to flow out of the pump chamber 12 and prohibits the gas from flowing in an opposite direction; an air chamber 41 into which the gas flown out of the pump chamber 12 via the discharge valve 30 flows; a discharge port 43 through which the gas is discharged outside the diaphragm pump 1; and a through-hole portion 44 which regulates the flow amount of the gas flowing from the air chamber 41 to the discharge port 43. <P>COPYRIGHT: (C)2010,JPO&INPIT |
