发明名称 PALETTE AUTOMATIC REPLACEMENT METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a palette automatic replacement device that shortens a palette replacement time. <P>SOLUTION: The palette automatic replacement device includes a palette positioning mechanism 5 which positions a palette 3 stored in a palette storage chamber 2, a palette fixation table 20 which moves to and away from the palette storage chamber 2 in directions for taking the palette 3 in and out, and a first fixation portion 23 which fixes and swivels the palette 3, the palette 3 being swiveled when replaced between the palette fixation table 20 and palette storage chamber 2 while the palette fixation table 20 is moved. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010177487(A) 申请公布日期 2010.08.12
申请号 JP20090019152 申请日期 2009.01.30
申请人 PANASONIC CORP 发明人 TAKANAMI YASUO
分类号 H01L21/52 主分类号 H01L21/52
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