| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic joined body without disturbing the flow of heated or cooled fluid, and also without leaking the fluid. Ž<P>SOLUTION: The ceramic joined body 1 is obtained by joining a substrate 2 provided with a flow passage 5 flowing fluid which is formed on the upper face so as to be a groove shape, an inner cover 3 having a shape matching to the flow passage 5 and covering the flow passage 5, and an outer cover 4 covering the upper faces of the inner cover 3 and the substrate 2 which are made of the same ceramic, respectively by a joining layer 7 made of the material same as that of the ceramic, and is provided with an entrance 6 for fluid passing through from the flow passage 5 to the substrate 2 or the outer cover 4. Even if fluid heated to high temperature or fluid subjected to cooling is passed through from the entrance 6 of fluid to the flow passage 5, since the characteristics of the substrate 2, the inner cover 3, the outer cover 4 and the joining layer 7 are the same, and the production of a difference in thermal expansion and shrinkage is reduced, failures such as cracks in the joining layer 7 are made hard to be generated. Further, since the flowing of a joining agent into the flow passage is reduced, fluid can be satisfactorily made to flow through the flow passage over a long period. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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