CARBON NANOTUBE AND METHOD OF MANUFACTURING THE SAME

摘要

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a carbon nanotube on a CoWP. Ž<P>SOLUTION: The method of manufacturing a carbon nanotube wiring structure includes: a plasma treatment step of plasma-treating a plating layer containing Co on a Cu wiring; an auxiliary catalyst providing step of providing an auxiliary catalyst for growing carbon nanotube to the Co-contained plating layer before or after the plasma treatment step; a heat treatment step of heat-treating the Co-contained plating layer and the auxiliary catalyst provided to the Co-contained plating layer after the plasma treatment step and the auxiliary catalyst providing step; and a carbon nanotube growing step in a plasma CVD method after the heat treatment step. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž