CARBURETOR, CARBURETOR FOR MOCVD USING SAME, CENTER ROD FOR USE IN THE CARBURETOR OR CARBURETOR FOR MOCVD, METHOD FOR DISPERSING CARRIER GAS, AND METHOD FOR VAPORIZING CARRIER GAS

摘要

Provided is a carburetor which can cool carrier gas efficiently, can contribute to prolongation of the maintenance time and to enhancement of the operation efficiency by enhancing the prevention effect of clogging with material in the vicinity of the outlet of a gas passage (5), and can exhibit more uniform dispersion effect. A carburetor is characterized in that the carburetor is provided with a center rod (35) which is inserted into a carrier gas introduction hole formed in a disperser (2) and cooperates with the inner wall thereof to form a gas passage (5), a cooling section which is arranged on the outer circumferential side of the carrier gas introduction hole of the disperser (2) and cools the interior of the gas passage (5), a cooling member insertion hole formed along the axial direction of the center rod over the substantially entire length thereof, and a cooling member which is arranged in the cooling member insertion hole and cools the center rod.