| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a ring band-shaped pupil intensity distribution set to a partial circumferential polarization state, having partially collapsing characteristics from a circumferential polarization state. <P>SOLUTION: A polarization conversion unit (5) in an illumination optical system is provided with: first polarization conversion parts (51a, 51b) for converting a first light flux (L11) and a fourth light flux (L12) that face a first direction (Y direction) into a first polarization state; a second polarization conversion part (52a, 52b) for converting a second optical flux (L13) and a fifth optical flux (L14) that faces a second direction (X direction) into a second polarization state; and third polarization conversion parts (53a, 53b, 53c) for converting a third light flux (L15) between the first light flux and the second light flux, a sixth light flux (L16) between the first light flux and the fifth light flux, a seventh light flux (L17) between the fourth light flux and the second light flux, and an eighth light flux (L18) between the fourth light flux and the fifth light flux into light fluxes in a third polarization state whose degree of polarization is low. <P>COPYRIGHT: (C)2010,JPO&INPIT |
