发明名称 VARIABLE FILTER DEVICE AND CONFOCAL MICROSCOPE
摘要 <P>PROBLEM TO BE SOLVED: To provide a variable filter device for efficiently shielding a specified wavelength of light. Ž<P>SOLUTION: Divergent light passing through an incident pinhole plate 2 is converted into collimated-light flux by a collimating lens 3, and made incident on an acousto-optical variable filter 4. The acousto-optical variable filter 4 is applied with a prescribed frequency of voltage to serve as a diffraction grating, diffraction light is emitted diagonally to an optical axis as shown by a dotted line, only zeroth-order light travels straight. The light flux emitted from the acousto-optical variable filter 4 is condensed by a condensing lens 5, in this case, the straight zeroth-order light passes through a pinhole of an emission pinhole plate 6, and is emitted toward the outside of the variable filter device 1. The diffraction light collides with a plate part of the emission pinhole plate 6 to be shielded, and is not emitted toward the outside of the variable filter device 1. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010175625(A) 申请公布日期 2010.08.12
申请号 JP20090015446 申请日期 2009.01.27
申请人 NIKON CORP 发明人 AIKAWA NAOSHI;YOSHIDA YUKI;YAMADA MASAYUKI
分类号 G02B21/06;G01N21/64;G02B5/00 主分类号 G02B21/06
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