| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor for precisely detecting a pressure P by making itself hard to be affected by such the condition that a load applied to its pressing member includes an unbalanced load component and a load vibrating in the lateral direction. Ž<P>SOLUTION: In a glow plug 100 having a tube internal pressure sensor, the pressing member 125 is bonded with the first main surface 130a of a Si element 130 so as to reach four periphery sides 130aj of the first main surface 130a while avoiding four corners 130ah1 and the like of the first main surface 130a. Furthermore, a pressure-sensitive resistor 131 is formed in the Si element 130 so as to be symmetrical about a point being the center K of a pressure-sensitive area 130ar which is in the first main surface 130a of the Si element 130, and in which the pressure-sensitive resistor 131 is formed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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