| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid precision opening and closing valve being fully opened and closed by set pressure with high precision. Ž<P>SOLUTION: This fluid precision opening and closing valve can be fully opened and closed by the predetermined pressure with high precision and is provided with a valve seat (11) provided in a valve body (10) of this valve, a valve element(1), and a coil spring (3) for pressing the valve element (1) against the valve seat (11). A spring receiver (4) is provided between the valve element (1) and the coil spring (3), and a face (1") abutted on the spring receiver (4) of the valve element (1) is a spherical face. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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