| 摘要 |
PROBLEM TO BE SOLVED: To achieve both retention of high resolution and simplification of a stage structure in a charged particle beam apparatus capable of performing beam scanning from a plurality of tilt directions. SOLUTION: The charged particle beam apparatus includes: a first charged particle optical system having a charged particle beam optical axis in the perpendicular direction relative to two directions of movement of a sample; a second charged particle optical system having a charged particle beam optical axis in the tilt direction relative to a direction of movement of a sample stage; a sample chamber holding the sample in vacuum atmosphere; a rolling mechanism rotated in the vacuum atmosphere, having an axis of rotation parallel to the first charged particle beam optical axis, and rotating the sample; and a conveyance mechanism conveying the sample between the rolling mechanism and the sample stage. COPYRIGHT: (C)2010,JPO&INPIT
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