| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact and high-sensitivity acceleration sensor. <P>SOLUTION: The acceleration sensor includes: a vibrating element 10 which is composed by arranging principal-surface electrodes on both principal surfaces of a plurality of rectangular piezoelectric substrates 11, and by jointing the plurality of rectangular piezoelectric substrates 11 with an insulating adhesive layer 12; and a protection case which has a space to allow the vibrating element 10 to vibrate, and in which the vibrating element 10 is sandwiched by support members 21, and is accommodated so as to be capable of vibrating while forming bend points near the support members 21. The sensor has a non-filled part 13 which is not filled with the insulating adhesive layer 12 in a portion where the vibrating element 10 is not sandwiched, near the boundary between a region where the vibrating element 10 is sandwiched by the support members 21 and a portion where the vibrating element 10 is not sandwiched by the support members 21. Since the non-filled part 13 is formed near a bend point, and an elasticity modulus becomes smaller near the bend point, the vibrating element 10 becomes easy to bend, and the sensitivity of acceleration detection is enhanced. Furthermore, since a free region of the vibrating element 10 is not enlarged in its length direction, the compact and high-sensitivity acceleration sensor can be obtained. <P>COPYRIGHT: (C)2010,JPO&INPIT |
