| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate breaking device which can make precise positioning of the substrate to be broken even when a brittle material substrate is a sheet for the purpose of breaking, and is broken at a small pitch. SOLUTION: This substrate breaking device includes a substrate supporting sheet 2 with a square-shaped opening 7 formed correspondingly to the shape of the brittle material substrate 1, an elastic film 4 which covers the opening 7 on the upper surface of the substrate supporting plate 2, upper breaking bars 6a and 6b which are arranged above the elastic film 4 so as to allow the upper breaking bars to move vertically and perform a breaking action along a scribing line 11, and a lower breaking bar 5 which is arranged below the elastic film 4 so as to allow the lower breaking bar to move vertically and performs a breaking action along the scribing line 11. Further, the lower breaking bar 5 is made to come into contact under pressure with the opposite side to the side where the scribing line 11 is formed, along the scribing line 11, and then, the substrate is broken with the help of the upper breaking bar 6b as the brittle material substrate 1 is held between the lower breaking bar 5 and the first upper breaking bar 6a. COPYRIGHT: (C)2010,JPO&INPIT |
