| 摘要 |
PROBLEM TO BE SOLVED: To perform parameter setting for automatic dimming easily in a short time without imposing a load on an operator so that an illumination level is maintained in a stable domain for line width measurement, when measuring a line width by a two-dimensional measuring machine. SOLUTION: Concerning an illumination device for illuminating a measuring object, an imaging part for imaging the measuring object, and a two-dimensional measuring device capable of measuring the line width by detecting a line edge from a brightness change of an image signal from the imaging part, following means are provided: an illumination level changing means (S6, S7, S8, S15) for changing stepwise the illumination level of the illumination device; line width measuring means (S9-S13) for measuring the line width in each step of the illumination level; a measured value storage means (S14) for storing the line width, the illumination level when measuring the line width, the maximum brightness and the minimum brightness; a brightness setting means (S16) for setting a brightness range of the image signal by detecting the stable domain for line width measurement based on the stored measured value; and an automatic dimming means for keeping brightness of the image signal in the set range. COPYRIGHT: (C)2010,JPO&INPIT
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