发明名称 ION GATE METHOD AND APPARATUS
摘要 The present invention generally relates to systems and methods for transmitting beams of charged particles, and in particular to such systems and methods that employ defecting at least one set of grid elements into the same plane to form an ion gate. In addition, an operation method of closing a gate involving alternating voltages on the adjacent gate wires is described.
申请公布号 US2010200745(A1) 申请公布日期 2010.08.12
申请号 US20100763092 申请日期 2010.04.19
申请人 EXCELLIMS CORPORATION 发明人 OSGOOD MARK A.;WU CHING
分类号 H01J49/04;H01B19/00;H01J49/26 主分类号 H01J49/04
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