| 摘要 |
PURPOSE: A probe card is provided to prevent the deformation of a substrate in vertical direction due to heat by using a plurality slots and a guide pins. CONSTITUTION: A substrate(112) comprises a plurality of elongated grooves(112a) which are extended in radial. A first substrate structure(110) comprises a plurality of probes contacting a target to be inspected. A second substrate structure(120) is electrically connected to the first substrate structure. A reinforcement plate(130) is combined in the upper part of the second substrate structure. |
