| 摘要 |
The invention relates to a support assembly for a substrate holder on which a semiconductor substrate is to be placed for layered deposition of various semiconductor materials on the semiconductor substrate, said support assembly comprising: at least one vertically disposed, rotatably drivable support shaft, as well as a substrate holder support supporting the substrate holder, which is to be placed on the free end of said support shaft, as well as fixation means are arranged for fixing the support shaft and the substrate holder support in position relative to each other. The invention also relates to a device for layered deposition of various semiconductor materials on a semiconductor substrate, at least comprising a processing space accommodating at least one substrate holder, on which the semiconductor substrate is to be placed, means for supplying the various semiconductor materials in gaseous form into the processing space, which substrate holder can be supported in use by at least one support assembly according to the invention. |
