发明名称 |
MULTILAYER PIEZOELECTRIC DEVICE |
摘要 |
To provide a monolithic piezoelectric element that can be easily manufactured while the stack is prevented from being mechanically broken by stress. The monolithic piezoelectric element includes a stack 10, and the stack 10 includes a crack-forming conductive layer 13 for forming a small crack therein. The small crack alleviates stress, thereby preventing the occurrence of such a large crack as extends to the piezoelectrically active region. |
申请公布号 |
EP1850403(A4) |
申请公布日期 |
2010.08.11 |
申请号 |
EP20050820084 |
申请日期 |
2005.12.22 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
HAYASHI, KOICHI;HONGO, HIROMITSU;KOBAYASHI, SHOZO |
分类号 |
H01L41/083;H01L41/187;H01L41/22;H01L41/273;H01L41/39 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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