发明名称 CERAMIC SUBSTRATE, METHOD FOR PRODUCING CERAMIC SUBSTRATE, AND METHOD FOR PRODUCING SUBSTRATE FOR POWER MODULE
摘要 Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom%.
申请公布号 EP2217043(A1) 申请公布日期 2010.08.11
申请号 EP20080846400 申请日期 2008.11.06
申请人 MITSUBISHI MATERIALS CORPORATION 发明人 TONOMURA, HIROSHI;KITAHARA, TAKESHI;ISHIZUKA, HIROYA;KUROMITSU, YOSHIROU;NAGATOMO, YOSHIYUKI
分类号 H05K1/03;C04B35/584;C04B37/02;H01L23/15;H05K1/02;H05K3/00 主分类号 H05K1/03
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