发明名称 |
CERAMIC SUBSTRATE, METHOD FOR PRODUCING CERAMIC SUBSTRATE, AND METHOD FOR PRODUCING SUBSTRATE FOR POWER MODULE |
摘要 |
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom%. |
申请公布号 |
EP2217043(A1) |
申请公布日期 |
2010.08.11 |
申请号 |
EP20080846400 |
申请日期 |
2008.11.06 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
TONOMURA, HIROSHI;KITAHARA, TAKESHI;ISHIZUKA, HIROYA;KUROMITSU, YOSHIROU;NAGATOMO, YOSHIYUKI |
分类号 |
H05K1/03;C04B35/584;C04B37/02;H01L23/15;H05K1/02;H05K3/00 |
主分类号 |
H05K1/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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