发明名称 TRANSRESISTANCE AMPLIFIER FOR A CHARGED PARTICLE DETECTOR
摘要 Disclosed is a transresistance amplifier for a charged particle detector, comprising a variable input resistance, which may be a phototransistor (IC 3 ), a voltage amplification stage (IC 1 ) and control means (IC 3 ), operable to vary the variable input resistance. The variable input resistance includes a first light-dependent resistance and the control means includes a first variable intensity light source that is optically coupled to the first light-dependent resistance. Also disclosed is a charged particle detector that includes such a transresistance amplifier and an electron microscope that includes such a charged particle detector.
申请公布号 EP1510002(B1) 申请公布日期 2010.08.11
申请号 EP20030727668 申请日期 2003.05.15
申请人 CARL ZEISS SMT LIMITED 发明人 ARMIT, ANDREW PHILIP
分类号 H03F3/08;H01J37/26;H03F1/56;H03F17/00;H03G1/00 主分类号 H03F3/08
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