发明名称 Method and apparatus for manufacturing magnetic recording media
摘要 According to one embodiment, a method for manufacturing a magnetic recording medium includes forming patterns having protrusions and recesses of a ferromagnetic material onto a recording track section and a servo section on a substrate, forming a flattening film, a top surface of which is higher than that of the protrusion of the ferromagnetic material, onto the ferromagnetic material, and performing ion beam etching onto the flattening film up to a top surface of the protrusion of the ferromagnetic material, and determining an end point of flattening etching on the basis of a change in the total number of incident particles by means of an ion counter installed so as to be at an angle &thetas; with respect to a perpendicular direction to the substrate in accordance with a material of the flattening film.
申请公布号 US7771602(B2) 申请公布日期 2010.08.10
申请号 US20060475873 申请日期 2006.06.28
申请人 KABUSHIKI KAISHA TOSHIBA;SHOWA DENKO K.K. 发明人 KAMATA YOSHIYUKI;NAITO KATSUYUKI;KIKITSU AKIRA;SAKURAI MASATOSHI;OKA MASAHIRO
分类号 B05D5/12;B05D3/00;B44C1/22;C23F1/00 主分类号 B05D5/12
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