发明名称 Optical unit and exposure apparatus having the same
摘要 An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.
申请公布号 US7771065(B2) 申请公布日期 2010.08.10
申请号 US20060402059 申请日期 2006.04.12
申请人 CANON KABUSHIKI KAISHA 发明人 SAI CHOSHOKU;SAKINO SHIGEO;ASADA KATSUMI;ITO HIROHITO;UCHIDA SHINJI
分类号 G02B5/08;G02B7/188;G02B26/08 主分类号 G02B5/08
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