发明名称 |
Hydrogen atom generation source in vacuum treatment apparatus, and hydrogen atom transportation method |
摘要 |
In a hydrogen atom generation source in a vacuum treatment apparatus which can effectively inhibit hydrogen atoms from being recombined due to contact with an internal wall surface of a treatment chamber of the vacuum treatment apparatus and an internal wall surface of a transport passage, and being returned into hydrogen molecules, at least a part of a surface facing a space with the hydrogen atom generation source formed therein of a member surrounding the hydrogen atom generation source is coated with SiO2. In a hydrogen atom transportation method for transporting hydrogen atoms generated by the hydrogen atom generation source in the vacuum treatment apparatus to a desired place, the hydrogen atoms are transported via a transport passage whose internal wall surface is coated with SiO2.
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申请公布号 |
US7771701(B2) |
申请公布日期 |
2010.08.10 |
申请号 |
US20050816726 |
申请日期 |
2005.07.15 |
申请人 |
CANON ANELVA CORPORATION |
发明人 |
UMEMOTO HIRONOBU;MASUDA ATSUSHI;YONEYAMA KOJI;ISHIBASHI KEIJI;IKEMOTO MANABU |
分类号 |
C01B3/02;B01J19/02;B05D7/22;C23C16/22 |
主分类号 |
C01B3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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