| 发明名称 |
Semiconductor manufacturing apparatus |
| 摘要 |
A semiconductor manufacturing apparatus has a nozzle with a plurality of tiny holes. The nozzle is connected to a vacuum pump through a valve without closing its end so as to be evacuated and purged independently of the reaction chamber.
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| 申请公布号 |
US7771535(B2) |
申请公布日期 |
2010.08.10 |
| 申请号 |
US20060511507 |
申请日期 |
2006.08.29 |
| 申请人 |
ELPIDA MEMORY, INC. |
发明人 |
KOYANAGI KENICHI |
| 分类号 |
C23C16/455;C23C16/06;C23C16/22;C23C16/448;C23C16/458;C23F1/00;H01L21/306 |
主分类号 |
C23C16/455 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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